Overview Notes: Lam Research demonstrates its advanced techniques for multiple patterning to create minute features on semiconductors. Ezequiel Russell of Micron makes the case for adopting curvilinear masks to extend DUV

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Lam Research demonstrates its advanced techniques for multiple patterning to create minute features on semiconductors. Rebecca Lipon, senior product marketing manager for verification at Synopsys, discusses the problematic X's and where ...

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  • Rebecca Lipon, senior product marketing manager for verification at Synopsys, discusses the problematic X's and where ...
  • Ezequiel Russell of Micron makes the case for adopting curvilinear masks to extend DUV
  • Lam Research demonstrates its advanced techniques for multiple patterning to create minute features on semiconductors.

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